Clarkson Researchers Publish a Perspective Study on Environmental Sustainability of consumables used for Chemical Mechanical planarization in Semiconductor Manufacturing. A team of researchers from Clarkson University has published a perspective paper in the prestigious journal ACS Sustainable Chemistry & Engineering, shedding light on the environmental impacts and sustainability challenges in the manufacturing of chemical mechanical planarization (CMP) consumables for the semiconductor industry. The significance of their work has been further recognized by the journal, which has selected the article to be featured on the cover of its latest issue.
The study, led by Professors Jihoon Seo and Alan Rossner and MSE PhD student Ravitej Venkataswamy, provides a comprehensive analysis of the energy, water, and material consumption in the production of key CMP consumables such as slurries, pads, brushes, cleaning solutions, and conditioners. The findings reveal that CMP consumable manufacturing, especially slurries and pads, is highly energy and water-intensive, uses hazardous materials, and significantly contributes to greenhouse gas emissions and resource depletion. “As the global demand for semiconductors continues to rise, it is crucial that we understand and address the environmental footprint of the manufacturing processes,” said Ravitej Venkataswamy, the student author of the article. “Our research provides a roadmap for the CMP community to adopt more sustainable practices, particularly in consumable manufacturing. We are thrilled that the journal has recognized the importance of our work by featuring it on the cover. “The paper calls for increased collaboration among chipmakers, consumable manufacturers, and academic institutions to better understand the environmental impacts of different materials used in consumable manufacturing and make environmentally conscious choices.
The authors emphasize the urgent need for the industry to prioritize sustainability alongside technological advancement.
The research was conducted in collaboration with the CMP team at Micron Technology, a world leader in innovating memory and storage solutions
The full paper, titled “Environmental Impacts and Sustainability of Chemical Mechanical Planarization Consumable Manufacturing in the Semiconductor Industry,” is available online at https://pubs.acs.org/doi/10.1021/acssuschemeng.4c03195. The cover featuring this article can be viewed at https://pubs.acs.org/cms/10.1021/ascecg.2024.12.issue-32/asset/ascecg.2024.12.issue-32.xlargecover-2.jpg
About the Authors:
Ravitej Venkataswamy is a PhD student in the Materials Science and Engineering Department at Clarkson University.
Dr. Alan Rossner is a Professor and Associate Director of Clarkson’s Institute for a Sustainable Environment.
Dr. Jihoon Seo is a Professor of Chemical and Biomolecular Engineering at Clarkson University.
