Clarkson University Department of Chemical and Biomolecular Engineering Seminar
“Advancing Molybdenum CMP: Understanding Inhibition Mechanism of Environmentally Friendly Amino Acids via Passivation Layer Analysis” Seokgyu Ryu AbstractMolybdenum (Mo) is increasingly recognized in the semiconductor industry for its superior conductivity, mechanical properties, and chemical stability, which positions Mo as a viable alternative to copper (Cu) in the Back End of Line (BEOL) process. Chemical Mechanical […]